Handbook
of Plasma Processing Technology: Fundamentals, Etching, Deposition and Surface Interactions

edited by
Stephen M. Rossnagel et al

The field of plasma-based thin film processing has grown rapidly over the past two decades. The technologies discussed in this book are the basis for the revolutionary increase in computer capabilities, as well as for such applications as tool coatings, food packaging, and architectural coatings on skyscraper windows.

Handbook of Plasma Processing Technology is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

The chapters provide a more concise view of the level of understanding of the field today, without wading through the entire history of each field.

Contents

1. General Information
   1. Techniques for IC Processing

2. Plasma Fundamentals
   2. Introduction to Plasma Concepts and Discharge Configurations
   3. Fundamentals of Sputtering and Reflection
   4. Bombardment-Induced Compositional Change with Alloys, Oxides, Oxysalts, and Halides

3. Non-Reactive Plasma Processes
   5. RF Diode Sputter Etching and Deposition
   6. Magnetron Plasma Deposition Processes
   7. Broad Beam Ion Sources

4. Reactive Plasma Processes
   8. Reactive Ion Etching
   9. Reactive Sputter Deposition
   10. Plasma Enhanced Chemical Vapor Deposition of Thin Films for Microelectronics
   11. Electron Cyclotron Resonance Microwave Discharges for Etching and Thin Film Deposition
   12. Hollow Cathode Etching and Deposition

5. Related Plasma Processes
   13. Ion Plating
   14. Ionized Cluster Beam (ICB) Deposition Techniques
   15. The Activated Reactive Evaporation (ARE) Process
   16. Formation of Thin Films by Remote Plasma Enhanced Chemical Vapor Deposition (Remote PECVD)
   17. Selective Bias Sputter Deposition
   18. Vacuum Arc-Based Processing

6. Plasma Surface Interactions
   19. Ion-Surface Interactions: General Understanding
   20. Ion Assisted Deposition
   21. Microstructural Control of Plasma-Sputtered Refractory Coatings

Index

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