Written by an interdisciplinary team of chemists, biologists and engineers from one of the leading European centers for microsystem research, MIC in Lyngby, Denmark, this book introduces and discusses the different aspects of (bio)chemical microsystem development. Unlike other, far more voluminous and theoretical books on this topic, this is a concise, practical handbook, focusing on analytical applications in chemistry and the life sciences.

Topics include:

• Microfluidics
• Silicon micromachining
• Glass and polymer micromachining
• Packaging
• Analytical chemistry

Illustrated with examples taken mainly from ongoing research projects at the Micro- an Nanotechnology Center (MIC).

Contents

1. Introduction
2. Clean Rooms
3. Microfluidics - Theoretical Aspects
4. Microfluidics - Components
5. Simulations in Microfluidics
6. Silicon and Cleanroom Processing
7. Glass Micromachining
8. Polymer Micromachining
9. Packaging of Microsystems
10. Analytical Chemistry on Microsystems

Subject Index

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