Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials.

Features:

• Provides an overview of techniques used in the semiconductor industry
• Discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications and the construction of nanoscale components using established lithographic techniques
• Details bulk and surface micromachining techniques used for etching, machining, and molding procedures and manufacturing techniques

Contents

• Micro- and Nanofabrication
• Microfabrication Using X-Ray Lithography
• Etching, Machining, and Molding High-Aspect Ratio Microstructures
• The Size Effect in Micromachining
• Mechanical Micromachining
• Precision Micro- and Nanogrinding
• CVD Diamond Technology for Microtools, NEMS, and MEMS Applications
• Laser-Based Micro- and Nanofabrication
• Pulsed Water Drop Micromachining
• Diamond Nanogrinding
• Nanometric Machining: Theory, Methods, and Implementation
• Nanocrystalline Diamond: Deposition Routes and Applications
• Commercialization Issues of Micro-Nano Technology
• The Future of Micro- and Nanomanufacturing

Index

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