The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry.

The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked.

Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods.

Nanoscale Calibration Standards and Methods addresses the topics of:

• the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing
• calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements
• instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing

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ORDER NOW Nanoscale Calibration Standards and Methods Dimensional and Related Measurements in the Micro- and Nanometer Range edited by G. Wilkening and L. Koenders 2005 • 519 pages • $229.00 + shipping Texas residents please add 6.75 % sales tax