This book starts out with the most important fundamentals of microtechnology and chemistry on which the understanding of shaping nanoscale structures are based, then a variety of examples illustrate the fabrication of nanostructures from different materials. Subsequently, methods for characterization of the generated structures are presented to the reader.
Through this fascinating introduction, both scientists and engineers gain insights into the “other side” of nanotechnology.
Contents
- Introduction.
- The Way into the Nanoworld.
- Building Blocks of Nanotechnology.
- Interactions and Topology.
- The Microscopic Environment of the Nanoworld.
- Molecular Basics.
- Particles and Bonds.
- Chemical Structure.
- Microtechnological Foundations.
- Planar Technology.
- Preparation of Thin Layers.
- Preparation of Ultrathin Inorganic Layers and Surface-bound Nanoparticles.
- Structure Generation and Fabrication of Lithographic Masks.
- Etching Processes.
- Packaging.
- Biogenic and Bioanalogue Molecules in Technical Microstructure.
- Preparation of Nanostructures.
- Principles of Fabrication.
- Nanomechanical Structure Generation.
- Nanolithography.
- Nanofabrication by Scanning Probe Techniques.
- Nanotechnical Structures.
- Inorganic Solids.
- Organic Solids and Layer Structures.
- Molecular Monolayer and Layer Architectures.
- Architectures with Single Molecules.
- Combination of Molecular Architectures and Nanoparticles with Planar Technical Structures.
- Characterization of Nanostructures.
- Geometrical Characterization.
- Characterization of Composition of Layers and Surfaces.
- Functional Characterization of Nanostructures.
- Nanotransducers.
- Design of Nanotransducers.
- Nanomechanical Elements.
- Nanoelectronic Devices.
- Nanooptical Devices.
- Magnetic Nanotransducers.
- Chemical Nanoscale Sensors and Actuators.
- Techncial Nanosystems.
- What are Nanosystems?
- Systems and Nanocomponents.
- Entire Systems with Nanometer Dimensions
Table of Examples
Index
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