Nanoelectronics book from C.H.I.P.S.
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RF MEMS and Their Applications
by Vijay K. Varadan
K. J. Vinoy
and K. A. Jose
The growing requirement for wireless devices with increased functionality and reduced power consumption is driving the development of new RF micro-electro-mechanical systems (RF MEMS).
RF MEMS and Their Applications sets out to address an increasing need for information by providing a vital overview of this emerging field.
RF MEMS and Their Applications:
- Presents an accessible review of MEMS devices and fabrication techniques.
- Discusses the development of RF MEMS switches and the attempts to reduce their actuation voltage.
- Outlines the design and development of RF MEMS based inductors, capacitors, filters and phase shifters.
- Covers the technology behind micromachined antennas.
- Describes integration and packaging techniques for RF MEMS devices.
- Gives a detailed overview of current microfabrication techniques
Contents:
- Microelectromechanical systems (MEMS) and radio frequency MEMS
- MEMS materials and fabrication techniques
- RF MEMS switches and micro relays
- MEMS inductors and capacitors
- Micromachined RF filters
- Micromachined phase shifters
- Micromachined transmission lines and components
- Micromachined antennae
- Integration and packaging for RF MEMS devices
Index
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RF MEMS and Their Applications
by Vijay K. Varadan, K. J. Vinoy and K. A. Jose
394 pages • $169.00 + shipping
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