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Nanoelectronics book from C.H.I.P.S.

RF MEMS
Theory, Design, and Technology
by Gabriel M. Rebeiz

Suitable as a tutorial for electrical and computer engineering students, or as an up-to-date reference for practicing circuit designers, RF MEMS provides the most comprehensive available survey of this new and important technology.

Contents:

  1. Introduction: RF MEMS for Microwave Applications
  2. Mechanical Modeling of MEMS Devices: Static Analysis
  3. Mechanical Modeling of MEMS Devices: Dynamic Analysis
  4. Electromagnetic Modeling of MEMS Switches
  5. MEMS Switch Library
  6. MEMS Switch Fabrication and Packaging
  7. MEMS Switch Reliability and Power Handling
  8. Design of MEMS Switch Circuits
  9. MEMS Phase Shifters
  10. Distributed MEMS Phase Shifters and Switches
  11. MEMS Varactors and Tunable Oscillators
  12. Micromachined Inductors
  13. Reconfigurable MEMS Networks, Filters, Antennas, and Subsystems
  14. Phase Noise Analysis of MEMS Circuits, Phase Shifters, and Oscillators
  15. Future Work in RF MEMS
Index

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RF MEMS
Theory, Design, and Technology
by Gabriel M. Rebeiz

483 pages • $134.00 + shipping
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