by L.N. Rozanov

Vacuum Technique presents a comprehensive treatment of vacuum technology. It gives an overview of the areas of low-pressure gases and discusses the theory of vacuum technology and mathematical modeling of gas transfer in vacuum systems.

The author presents explanations of specific problems in favor of describing different vacuum elements. The computer-aided synthesis and analysis of vacuum systems is of special interest. The book includes different design methods and presents the structure and characteristics of vacuum systems for low, middle, high and superhigh vacuums. The author also discusses the characteristics of materials, joints, movement inputs, and all aspects of production technology and construction standards.

Vacuum Technique will be relevant for engineers, technicians and graduate professionals who require expertise in vacuum technique and students in experimental physics, electronics, chemical machinery, thin film production and metallurgy.

Contents

1. Introduction
2. Properties of Gases at Low Pressures
3. Theory
4. Measurement of Vacuum
5. Mechanical Methods of Vacuum Production
6. Physico-Chemical Methods of Vacuum Production
7. Analysis of the Vacuum Systems
8. Design of Vacuum Systems
9. Construction of Vacuum Systems
10. Problems

Reference Tables
Appendices
Index

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