MEMS Handbook comprises contributions from the foremost experts in their respective specialties from around the world.

Features:

• Provides complete coverage of the broad, interdisciplinary, and quickly growing fields of MEMS and nanotechnology
• Comprises chapters from leading experts from around the world
• Updates existing chapters where necessary and includes seven completely new chapters
• Includes numerous case studies, examples, figures, and illustrations

Volume 1: MEMS: Introduction and Fundamentals

Contents

1. Scaling of Micromechanical Devices
2. Mechanical Properties of MEMS Materials
3. Flow Physics
4. Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains
5. Molecular-Based Microfluidic Simulation Models
6. Hydrodynamics of Small-Scale Internal Gaseous Flows
7. Burnett Simulations of Flows in Microdevices
8. Lattice Boltzmann Simulations of Slip Flows in Microchannels
9. Liquid Flow in Microchannels
10. Lubrication in MEMS
11. Physics of Thin Liquid Films
12. Bubble/Drop Transport in Microchannels
13. Fundamentals of Control Theory
14. Model-Based Flow Control for Distributed Architectures
15. Soft Computing in Control

Index

Volume 2: MEMS: Design and Fabrication

Contents

1. Materials for Microelectromechanical Systems
2. MEMS Fabrication
3. LIGA and Micromolding
4. X-Ray Based Fabrication
5. EFAB® Technology and Applications
6. Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization, and Reliability
7. Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide
8. Polymer Microsystems: Materials and Fabrication
9. Optical Diagnostics to Investigate the Entrance Length in Microchannels
10. Microfabricated Chemical Sensors for Aerospace Applications
11. Packaging of Harsh Environment MEMS Devices
12. Fabrication Technologies for Nanoelectromechanical Systems
13. Molecular Self-Assembly: Fundamental Concepts and Applications

Index

Volume 3: MEMS: Applications

Contents

1. Inertial Sensors
2. Micromachined Pressure Sensors: Devices, Interface Circuits, and Performance Limits
3. Surface Micromachined Devices
4. Microactuators
5. Sensors and Actuators for Turbulent Flows
6. Microrobotics
7. Microscale Vacuum Pumps
8. Nonlinear Electrokinetic Devices
9. Microdroplet Generators
10. Micro Heat Pipes and Micro Heat Spreaders
11. Microchannel Heat Sinks
12. Flow Control
13. Reactive Control for Skin-Friction Reduction
14. Toward MEMS Autonomous Control of Free-Shear Flows

Index

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