Concepts, Designs, Materials, and Processes by Ken Gilleo
MEMS/MOEMS Packaging rigorously examines the properties of the materials used in MEMS and MOEN assembly then evaluates them in terms of their routing, electrical performance, thermal management and reliability.
With this as a starting point, MEMS/MOEMS Packaging moves on to discuss advanced packaging methods such as: molded thermoplastic packages for MEMS, wafer-assembled RFID, and wafer-level stacked packaging.
Contents:
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