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Nanomanufacturing book from C.H.I.P.S.

MEMS/MOEMS Packaging
Concepts, Designs, Materials, and Processes
by Ken Gilleo

MEMS/MOEMS Packaging rigorously examines the properties of the materials used in MEMS and MOEN assembly then evaluates them in terms of their routing, electrical performance, thermal management and reliability.

With this as a starting point, MEMS/MOEMS Packaging moves on to discuss advanced packaging methods such as: molded thermoplastic packages for MEMS, wafer-assembled RFID, and wafer-level stacked packaging.

Contents:

  1. Engineering Fundamentals of Packaging for MEMS and MOEM Devices
  2. Principles, Materials and Fabrication of MEMS and MOEM Devices
  3. Evaluation Methods for MEMS and MOEM Packaging Challenges
  4. MEMS Packaging Processes
  5. From MEMS and MOEMS to Nano Technology
Index

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MEMS/MOEMS Packaging
Concepts, Designs, Materials, and Processes
by Ken Gilleo

2005 • 220 pages • $164.00 + shipping
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