MEMS offers a wealth of analytical techniques treating problematic areas such as alternative designs reliability, packaging, and cost effectiveness.

Features:

• Answers central questions in the first stages of device design such as: what is out there, what works, and what is still speculative
• Provides data for selecting devices, systems, electronics, and packaging
• Provides rapid access to literature for additional details
• Covers MEMS operational principles, process material properties, CAD & modeling, transducer devices, manufacturing technologies, and interface circuitry

Contents

• Microtransducer Operation
• Material Properties: Measurement and Data
• MEMS and MEMS Simulation
• System-Level Simulation of Microsystems
• Thermal Based Sensors
• Photon Detectors
• Free-Space Optical MEMS
• Integrated Micro-Optics
• Magnetic Microsensors
• Mechanical Microsensors
• Semiconductor-Based Chemical Microsensors
• Microfluidics
• Biomedical Microsystems
• Microactuators
• Micromachining Technology
• Interface Circuitry and Microsystems

Index

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